X-Prep® Vision™
Substrate Measurement Instrument
Mechanical Milling
A precision optical metrology tool designed to enable uniform substrate thinning
The X-Prep® Vision™ is a metrology tool that enables measurement of silicon and semitransparent substrates. It is necessary for applications that require uniform thinning to a specific target with a tolerance of +/- 3 µm or better.
The X-Prep® fixture adapter is also secured to the motorized stage on the X-Prep® Vision™, ensuring the measurement/tool control coordinates remain aligned when transferred between systems.
A library with over 130 materials (i.e., GaAs, InGaAs, SiC, Sapphire/Al2O3, InP, SiGe, GaN, photo-resist) is included with every system.
Measurement & Observation – How it Works
IR light is focused onto a sample, and a unique signal based on the refractive index of the material is created. The return signal is analyzed by the software to produce a thickness value.
Measuring Below 10 µm Thickness
For applications requiring thinning to less than 10 µm, precise measurement is possible only by adding the visible light spectrometer accessory.
Features
- Visible and IR (1310 nm) spectrometers for measuring from 20 nm to 1 mm
- Motorized, automatic X/Y/Z positioning for multipoint measurements
- Includes a material library with over 130 materials (i.e., GaAs, InGaAs, SiC, SiGe, etc.) for film stack measurements
- Stage adapter for X-Prep® fixtures that ensures accurate registration between systems
- Custom software to manage the mapping data of up to four (4) samples
Related Products
X-Prep® Vision™ Accessories
X-Prep® Vision Accessories™ include items for exclusive use with this instrument.
X-Prep®
The X-Prep® is a specialized 5-axis CNC-based milling/grinding/polishing machine designed to support electrical and physical failure analysis techniques and other applications requiring high precision sample preparation.
Details
2D data provided
3D data provided
Substrate Measurement System – Custom software directly support up to four (4) X-Prep samples/jobs