CMP Wafer Lapping Fixtures
Overview
Sample Holders
Central‑force wafer sample holders engineered to securely retain wafers while conditioning the pad for flat, uniform polishing results.
These central force sample holders are designed for polishing wafers using a semi-automatic grinder/polisher.
They feature an outer, spring-loaded compression ring that holds the wafer in place, but also conditions and compresses the pad for maximum flatness and minimal edge rounding.
Wafers are held in place using water or a preferential light grease.
Features
- Manually operated saw for a wide variety of materials
- 10″ (254 mm) diameter blade capacity
- Cutting capacity: up to 3.75″ (95 mm) bar stock
- Powerful 3.5 HP (2600 W) stainless steel waterproof motor
- 5″ (127 mm) distance between blade and motor, allowing longer/larger parts to be sectioned
- Side port for cutting long samples
- Optional blade position laser indicator and electro-mechanical safety lock
Details
Quick Slide Vice – can be positioned anywhere along the T-slots, and allow samples up to 3″ (76 mm) deep to be secured.
Chamber Cleaning – simply adjust the valve to redirect coolant from the blade to the cleaning hose.
Vertical Adjusting Clamp – can be positioned in any orientation throughout the T-slots in the tables.